mi cromachined silicon pressure sensors uncompensated and compensated and calibrated xsxl, xsx, xscl, xsc series sensing and control features low cost, small size temperature compensated zero and span calibrated millivolt output differential, gage and absolute pressure constant voltage excitation high impedance ? low current typical applications medical applications applications requi ring small size applications requiring vacuum and positive pressure reference, or both warning personal injury do not use these products as safety or emergency stop devices or in any other application where failure of the product could result in p ersonal injury. failure to comply with these instructions could result in death or serious injury. the xsxl/xsx and xscl/xsc series sensors integrate silicon micromachined sensing technology, temperature compensation, and calibration in a complete fa mily of low cost packages. this series offers the most cost - effective solution for design requirements. these piezoresistive pressure sensors use micromachined silicon chips mounted on a ceramic and protected with a plastic cap. several tube arrangements with nylon housings are available for various pressure applications. on devices of 5 psi and above, the topside of the chip is protected against humidity by a silgel coating. while the sensors are designed for use with noncorrosive, nonionic pressure med ia, they accommodate many gases that are used in medical applications. warning misuse of documentation the information presented in this product sheet is for reference only. do not use this document as product installation information. complete instal lation, operation, and maintenance information is provided in the instructions supplied with each product. failure to comply with these instructions could result in death or serious injury.
micromachined silicon pressure sensors uncompensated and compensated and calibrated xsxl, xsx, xscl, xsc series 2 honeywell sensing and control xsxl/xsx and xscl/xsc electrical specifications at 12 0.01 vdc excitation @ 25 c* xsxl and xsx xscl and xsc min. typ. m ax . min. typ. m ax . units excitation voltage 3.0 12.0 16.0 3.0 12.0 16.0 vdc null - 120 0 +120 - 1.0 0 +1.0 mv offset temperature shift (0 c to 70 c)** -- 0.5 -- -- -- 1.0 mv full sca le temperature shift (0 c to 70 c)** -- - 2050 ppm/ c -- -- -- 2 % span linearity, hysteresis error*** -- 0.25 1.0 -- 0.25 1.0 % span input resistance 5.0 -- -- 5.0 -- -- k w output resistance -- 3.0 -- -- 3.0 -- k w operating temperature - 25 -- +85 - 25 -- +85 c storage temperature - 40 -- +125 - 40 -- +125 c common mode pressure 50 50 psi proof pressure 3x -- -- 3x -- -- fs proof pressure xsxl/xscl 100 100 in h 2 o burst pressure 5x -- -- 5x -- -- fs weight 2 2 gram * note 1: a ll parameters are measured at 12 vdc excitation, pressure specs obtained with pressure applied to the front of the sensor. ** note 2: shift is relative to 25 c *** note 3: measured at ? full scale rated pressure using bfsl xsx/xsc absolute output at 12 vdc 0.01 excitation @ 25 c fs pressure xsx output full scale span, (mv) xsc output full scale span, (mv) ( psi ) min. typ. max. min. typ. max. 5 270 420 540 57 60 63 15 405 630 810 85 90 95 30 405 630 810 85 90 95 60 454 634 813 85 90 95 100 504 708 912 95 100 105 150 450 630 810 -- -- -- 300 324 612 900 -- -- -- xsxl/xsx and xscl/xsc gage and differential* output at 12 vdc 0.01 excitation @ 25 c fs pressure xsxl/xsx output full scale span, (mv) xscl/xsc output full scale span, (mv) (psi) m in. typ. max. min. typ. max. 4 in h 2 o 50 68 86 23 25 27 10 in h 2 o 22 42 62 19 20 21 1 96 180 204 17 18 19 5 270 420 540 57 60 63 15 405 630 810 85 90 95 30 406 630 810 85 90 95 60 454 634 813 85 90 95 100 504 708 912 95 100 105 150 450 630 810 85 90 95 300 324 612 900 -- -- -- * differential common mode pressure should not exceed 50 psi
mic romachined silicon pressure sensors uncompensated and compensated and calibrated xsxl, xsx, xscl, xsc series honeywell sensing and control 3 mounting dimensions ( for reference only ) mm/in xsxl/xsx and xscl/xs c s eries xsc ceramic without port xsc ceramic with port (f) equivalent circuit 1 2 3 4 pin designations 1. ? v excitation 2. + output signal 3. + v excitation 4. ? output signal media compatibility p1 port: dry gases only. media must be compatible with epoxy based adhesive p2 port : media must be compatible with nylon housing, epoxy adhesive and silicon. xscl/xsc differential port
micromachined silicon pressure sensors uncompensated and compensated and calibrated xsxl, xsx , xscl, xsc series sensing and control honeywell 11 west spring street freeport, illinois 61032 printed with soy ink on 50% recycled paper 008056 - 2 - en il50 glo 0801 printed in usa copyright ? 1998 - 2001 by honeywell data instruments inc. all righ ts reserved. www.honeywell.com/sensing xsxl/xsx and xscl/xsc series order guide ( not all product combinations are released .) l - low pressure (in h2o) no character - indicates pressure (psi) xsx -- uncompensated and uncalibrated, mv xsc -- motorola, compensated and calibrated, mv accuracy grade c - commercial series xsx l 04 g b c pressure reference g - gage d - differential a - absolute > 5 psi port operation 1 b - backside f - axial t - radial fs - offset axial 1 pressure measurement f port option pressure range 04 in h 2 0, 10 in h 2 o 01, 05, 15, 30, 60, 100, 150 300 psi note 1: option available in ported gage version only warranty/remedy hone ywell warrants goods of its manufacture as being free of defective materials and faulty workmanship. contact your local sales office for warranty information. if warranted goods are returned to honeywell during the period of coverage, honeywell will repair or replace without charge those items it finds defective. the foregoing is buyer?s sole remedy and is in lieu of all other warranties, expressed or implied, including those of merchantability and fitness for a particular purpose. specifications may chang e without notice. the information we supply is believed to be accurate and reliable as of this printing. however, we assume no responsibility for its use. while we provide application assistance personally, through our literature and the honeywell web site , it is up to the customer to determine the suitability of the product in the application. for application assistance, current specifications, or name of the nearest authorized distributor, contact a nearby sales office. or call: 1 - 800 - 537 - 6945 usa 1 - 800 - 737 - 3360 canada 1 - 815 - 235 - 6847 international fax 1 - 815 - 235 - 6545 usa internet www.honeywell.com/sensing info.sc@micro.honeywell.com
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